Integrated chemical sensors based on carbon black and polymer films using a standard CMOS process and post-processing
نویسندگان
چکیده
We present an integrated chemical sensor array fabricated using a CMOS process followed by post-processing. The sensor presented in this paper incorporates 324 individually addressable sensing nodes. Post processing involves an electroless Nickel and Gold plating step to fabricate sensing contacts, and the deposition of a carbon black based polymer sensor material. The operation of the integrated sensor is confirmed. This sensor technology will allow the creation of large arrays of chemically diverse sensors.
منابع مشابه
An Integrated Chemical Sensor Array Using Carbon Black Polymers and a Standard Cmos Process
We have developed a new chemical sensor array by combining polymer-based chemiresistors with a standard integrated circuit technology. We fabricated an array of addressable chemical sensor sites in a CMOS process, and then performed a post-processing step of electroless gold to create sensor contacts. We create sensors by spraying a mixture of nonconductive polymers and carbon black particles o...
متن کاملMiniature Electronic Nose System Based on Polymer/carbon Black Films
Introduction The ability to monitor and detect various chemical gases is important to many applications. One example is environmental monitoring, such as determining the air quality inside a room or closed chamber and detecting the presence and concentration of toxic or otherwise dangerous gases that may come from spills and leaks [1]. Monitoring and determining the constituents of a sample gas...
متن کاملA Fully Integrated Range-Finder Based on the Line-Stripe Method
In this paper, an imaging chip for acquiring range information using by 0.35 μm CMOS technology and 5V power supply has been described. The system can extract range information without any mechanical movement and all the signal processing is done on the chip. All of the image sensors and mixed-signal processors are integrated in the chip. The design range is 1.5m-10m with 18 scales.
متن کاملLaser-based processing of polymer nanocomposites for chemical sensing applications
Pulsed laser deposition ~PLD! has been used to fabricate polymer/carbon nanocomposite thin films for use in chemical sensors ~chemiresistors!. Ethylene vinyl acetate copolymer ~EVA! films ~undoped and 20% carbon by weight! were deposited using an ArF excimer laser ~193 nm! at fluences between 150 and 300 mJ/cm. The structure and morphology of the deposited films were characterized using Fourier...
متن کاملFlexible Carbon Nanotube Films for High Performance Strain Sensors
Compared with traditional conductive fillers, carbon nanotubes (CNTs) have unique advantages, i.e., excellent mechanical properties, high electrical conductivity and thermal stability. Nanocomposites as piezoresistive films provide an interesting approach for the realization of large area strain sensors with high sensitivity and low manufacturing costs. A polymer-based nanocomposite with carbon...
متن کامل